Chih-HaoChang
Professor
- chichang@utexas.edu
- ETC 4.152A
Research Interests
Nanofabrication process and nanomanufacturing; 2D/3D nanolithography and EUV lithography; Multifunctional nanostructured materials; Optical systems and metrology
Nanofabrication process and nanomanufacturing; 2D/3D nanolithography and EUV lithography; Multifunctional nanostructured materials; Optical systems and metrology